.pl 78
.ll 60
.tr |
.hy 0
.he '''Bobeck-Scovil 79-20'
.fo ''- i -''
.na
.ds
.m1 6
.m2 2
.m3 3
.m4 3
.n1
.nn 
.ce 
.sp 9
.ds
.ul
Abstract of the Disclosure
.ta 10
.pa 1
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.ul
Description of the Prior Art
	The current trend in seimiconductor circuit
manufacture is toward the attainment of the
highest density of circuit functions
per unit area of semiconductor.  System
reliability, speed and economic considerations
are advantageously affected by this
miniaturization.  Although studies have
continue